ABSTRACT

GaAs processing has reached a mature stage. New semiconductor compounds are emerging that will dominate future materials and device research, although the processing techniques used for GaAs will still remain relevant. This book covers all aspects of the current state of the art of III-V processing, with emphasis on HBTs. It is aimed at practicing

chapter 1|30 pages

Semiconductor Basics

chapter 2|48 pages

GaAs Devices

chapter 4|40 pages

Epitaxy

chapter 5|32 pages

Photolithography

chapter 6|22 pages

Wet Etching, Cleaning, and Passivation

chapter 7|46 pages

Plasma Processing and Dry Etching

chapter 8|38 pages

Deposition Processes

chapter 9|40 pages

Ion Implantation and Device Isolation

chapter 10|20 pages

Diffusion in III–V Compound Semiconductors

chapter 11|26 pages

Ohmic Contacts

chapter 12|18 pages

Schottky Diodes and FET Processing

chapter 13|20 pages

HEMT Process

chapter 14|30 pages

HBT Processing

chapter 15|18 pages

BiFET and BiHEMT Processing

chapter 16|14 pages

MOSFET Processing

chapter 17|22 pages

Passive Components

chapter 18|14 pages

Interconnect Technology

chapter 19|24 pages

Backend Processing and Through-Wafer Vias

chapter 20|14 pages

Electroplating

chapter 21|36 pages

Measurements and Characterization

chapter 22|22 pages

Reliability

chapter 23|58 pages

GaN Devices

chapter 24|16 pages

RF MEMS