ABSTRACT

This book focuses on the fabrication and applications of cantilever beams with nanoscale dimensions. Nanometer-size mechanical structures show exceptional properties generated by their reduced dimensions. These properties enable new sensing concepts and transduction mechanisms that will allow the enhancement of the performance of devices to their f

part |2 pages

Part 1 - Techniques for the Fabrication of Nanocantilever Beams

part |2 pages

Part 2 - Nonlinearity of Nanocantilever Beam Resonators

part |2 pages

Part 3 - Applications of Nanocantilever Beams

chapter 6|22 pages

- Membrane-Type Surface Stress Sensor

chapter 15|20 pages

- Nanocantilever Beams as Biological Sensors