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http://dx.doi.org/10.1201/9781420027198
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Front MatterAbstract - Hi-Res PDF (655 KB) - PDF w/links (656 KB)
Chapter 1. Semiconductor and Wafer Manufacturing FacilitiesAbstract - Hi-Res PDF (387 KB) - PDF w/links (387 KB)
Chapter 2. Exhaust Types and ChallengesAbstract - Hi-Res PDF (402 KB) - PDF w/links (403 KB)
Chapter 3. Point-Of-Use Devices and Exhaust- Line RequirementsAbstract - Hi-Res PDF (993 KB) - PDF w/links (993 KB)
Chapter 4. Centralized ScrubbersAbstract - Hi-Res PDF (688 KB) - PDF w/links (689 KB)
Chapter 5. Centralized Equipment to Control Volatile Organic CompoundsAbstract - Hi-Res PDF (618 KB) - PDF w/links (618 KB)
Chapter 6. Emergency ReleasesAbstract - Hi-Res PDF (249 KB) - PDF w/links (250 KB)
Chapter 7. Exhaust Management and Air Abatement Equipment ExamplesAbstract - Hi-Res PDF (677 KB) - PDF w/links (678 KB)
