ABSTRACT

Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book:Offers an overview of ion beam technologies, f

chapter 1|20 pages

Ion Beam Technology: Overview and History

chapter 4|30 pages

Gas Cluster Ion Beam Equipment

chapter 6|26 pages

Cluster Ion Beam Sputtering

chapter 7|18 pages

Cluster Ion Implantation

chapter 8|20 pages

Cluster Ion Beam– Assisted Deposition

chapter 9|40 pages

Applications

chapter 10|4 pages

Conclusions