ABSTRACT
Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text:
- Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements
- Addresses interferometry, holography, and speckle methods and applications
- Explains Moiré metrology and the optical heterodyne measurement method
- Delves into the specifics of diffraction, scattering, polarization, and near-field optics
- Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes
This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.
TABLE OF CONTENTS
section 1|158 pages
Fundamentals of Optical Elements and Devices
section 2|243 pages
Fundamentals of Principles and Techniques for Metrology
section 3|485 pages
Practical Applications
