Optical Science and Engineering

Photonic MEMS Devices

Citation Information
Photonic MEMS Devices
Design, Fabrication and Control
Ai-Qun Liu , Xuming Zhang , Jing Li , Selin Hwee Gee Teo , Frank L. Lewis , and Bruno Borovic
CRC Press 2009
Print ISBN: 978-1-4200-4568-0
eBook ISBN: 978-1-4200-4571-0