ABSTRACT

Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model.

Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization o

chapter 1|14 pages

Introduction

chapter 2|50 pages

A Refresher on Continuum Mechanics

chapter 3|26 pages

Small is Different

chapter 4|40 pages

Thermally Driven Systems

chapter 5|46 pages

Modeling Elastic Structures

chapter 6|36 pages

Modeling Coupled Thermal-Elastic Systems

chapter 7|54 pages

Modeling Electrostatic-Elastic Systems

chapter 8|30 pages

Modeling Magnetically Actuated Systems

chapter 9|18 pages

Microfluidics

chapter 10|10 pages

Beyond Continuum Theory