ABSTRACT

The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked for a comprehensive handbook,

part |2 pages

Part I: Fundamentals of Optical Elements and Devices

chapter 1|82 pages

Light Sources

chapter 2|20 pages

Lenses, Prisms, and Mirrors

chapter 3|30 pages

Optoelectronic Sensors

part |2 pages

Part II: Fundamentals of Principles and Techniques for Metrology

chapter 5|34 pages

Propagation of Light

chapter 6|28 pages

Interferometry

chapter 7|22 pages

Holography

chapter 8|22 pages

Speckle Methods and Applications

chapter 9|18 pages

Moire Metrology

chapter 10|28 pages

Optical Heterodyne Measurement Method

chapter 11|12 pages

Diffraction

chapter 12|18 pages

Light Scattering

chapter 13|12 pages

Polarization

chapter 14|14 pages

Near-Field Optics

chapter 15|26 pages

Length and Size

part |2 pages

Part III: Practical Applications

chapter 16|18 pages

Displacement

chapter 17|12 pages

Straightness and Alignment

chapter 18|14 pages

Flatness

chapter 19|38 pages

Surface Profi lometry

chapter 20|24 pages

Three-Dimensional Shape Measurement

chapter 21|12 pages

Fringe Analysis

chapter 22|20 pages

Photogrammetry

chapter 23|20 pages

Optical Methods in Solid Mechanics

chapter 24|22 pages

Optical Methods in Flow Measurement

chapter 25|42 pages

Polarimetry

chapter 26|26 pages

Birefringence Measurement

chapter 27|20 pages

Ellipsometry

chapter 28|16 pages

Optical Thin Film and Coatings

chapter 29|16 pages

Film Surface and Thickness Profi lometry

chapter 30|22 pages

On-Machine Measurements