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Front MatterAbstract - Hi-Res PDF (719 KB) - PDF w/links (656 KB)
Chapter 1. IntroductionAbstract - Hi-Res PDF (281 KB) - PDF w/links (291 KB)
Chapter 2. Materials for Microelectro-mechanical SystemsChristian A. Zorman, Mehran MehreganyAbstract - Hi-Res PDF (1433 KB) - PDF w/links (1373 KB)
Chapter 3. MEMS FabricationGuangyao Jia, Marc J. MadouAbstract - Hi-Res PDF (8554 KB) - PDF w/links (8396 KB)
Chapter 4. LIGA and MicromoldingGuangyao Jia, Marc J. MadouAbstract - Hi-Res PDF (3405 KB) - PDF w/links (3387 KB)
Chapter 5. X-Ray–Based FabricationTodd ChristensonAbstract - Hi-Res PDF (2867 KB) - PDF w/links (2917 KB)
Chapter 6. EFAB™ Technology and ApplicationsChristopher A. Bang, Adam L. Cohen, Ezekiel J. J. KruglickAbstract - Hi-Res PDF (1285 KB) - PDF w/links (1249 KB)
Chapter 7. Single-Crystal Silicon Carbide MEMSRobert S. OkojieAbstract - Hi-Res PDF (1926 KB) - PDF w/links (1865 KB)
Chapter 8. Deep Reactive Ion Etching for Bulk Micromachining of Silicon CarbideLaura J. Evans, Glenn M. BeheimAbstract - Hi-Res PDF (847 KB) - PDF w/links (819 KB)
Chapter 9. Polymer MicrosystemsGary M. Atkinson, Zoubeida OunaiesAbstract - Hi-Res PDF (3914 KB) - PDF w/links (3170 KB)
Chapter 10. Optical Diagnostics to Investigate the Entrance Length in MicrochannelsSteven T. Wereley, Sang-Youp Lee, Jaesung JangAbstract - Hi-Res PDF (2226 KB) - PDF w/links (2081 KB)
Chapter 11. Microfabricated Chemical Sensors for Aerospace ApplicationsDarby B. Makel, Chung-Chiun Liu, Gary W. Hunter, Jennifer C. XuAbstract - Hi-Res PDF (1555 KB) - PDF w/links (1495 KB)
Chapter 12. Packaging of Harsh Environment MEMS DevicesLiang-Yu Chen, Jih-Fen LeiAbstract - Hi-Res PDF (1405 KB) - PDF w/links (1347 KB)
Chapter 13. Fabrication Technologies for Nanoelectro-mechanical SystemsHolly V. Goodson, Gregory L. Snider, Gary H. BernsteinAbstract - Hi-Res PDF (1481 KB) - PDF w/links (1517 KB)
Chapter 14. Molecular Self-AssemblyFederico Rosei, Jill A. MiwaAbstract - Hi-Res PDF (1322 KB) - PDF w/links (1288 KB)
