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http://dx.doi.org/10.1201/9780849380709
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Front MatterAbstract - Hi-Res PDF (348 KB) - PDF w/links (349 KB)
Chapter 1. Highlights and Chronological Developmental History of MEMS Devices Involving NanotechnologyAbstract - Hi-Res PDF (453 KB) - PDF w/links (454 KB)
Chapter 2. Potential Actuation Mechanisms, Their Performance Capabilities, and ApplicationsAbstract - Hi-Res PDF (886 KB) - PDF w/links (887 KB)
Chapter 3. Latest and Unique Methods for ActuationAbstract - Hi-Res PDF (825 KB) - PDF w/links (826 KB)
Chapter 4. Packaging, Processing, and Material Requirements for MEMS DevicesAbstract - Hi-Res PDF (363 KB) - PDF w/links (364 KB)
Chapter 5. RF-MEMS Switches Operating at Microwave and mm-Wave FrequenciesAbstract - Hi-Res PDF (734 KB) - PDF w/links (737 KB)
Chapter 6. RF/Microwave MEMS Phase ShifterAbstract - Hi-Res PDF (627 KB) - PDF w/links (632 KB)
Chapter 7. Applications of Micropumps and MicrofluidicsAbstract - Hi-Res PDF (491 KB) - PDF w/links (492 KB)
Chapter 8. Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military ApplicationsAbstract - Hi-Res PDF (1044 KB) - PDF w/links (1047 KB)
Chapter 9. Materials for MEMS and Nanotechnology-Based Sensors and DevicesAbstract - Hi-Res PDF (296 KB) - PDF w/links (297 KB)
