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Front MatterAbstract - Hi-Res PDF (226 KB) - PDF w/links (227 KB)
Chapter 1. IntroductionAbstract - Hi-Res PDF (148 KB) - PDF w/links (155 KB)
Chapter 2. Scaling of Micromechanical DevicesWilliam Trimmer, Robert H. StroudAbstract - Hi-Res PDF (106 KB) - PDF w/links (107 KB)
Chapter 3. Mechanical Properties of MEMS MaterialsWilliam N. SharpeAbstract - Hi-Res PDF (9414 KB) - PDF w/links (804 KB)
Chapter 4. Flow PhysicsAbstract - Hi-Res PDF (438 KB) - PDF w/links (464 KB)
Chapter 5. Integrated Simulation for MEMSRobert M. Kirby, George Em Karniadakis, Oleg Mikulchenko, Kartikeya MayaramAbstract - Hi-Res PDF (519 KB) - PDF w/links (396 KB)
Chapter 6. Liquid Flows in MicrochannelsKendra V. Sharp, Ronald J. Adrian, Juan G. Santiago, Joshua I. MolhoAbstract - Hi-Res PDF (1115 KB) - PDF w/links (768 KB)
Chapter 7. Burnett Simulations of Flows in MicrodevicesRamesh K. Agarwal, Keon-Young YunAbstract - Hi-Res PDF (1033 KB) - PDF w/links (862 KB)
Chapter 8. Molecular-Based Microfluidic Simulation ModelsAli BeskokAbstract - Hi-Res PDF (931 KB) - PDF w/links (886 KB)
Chapter 9. Lubrication in MEMSKenneth S. BreuerAbstract - Hi-Res PDF (2799 KB) - PDF w/links (569 KB)
Chapter 10. Physics of Thin Liquid FilmsAlexander OronAbstract - Hi-Res PDF (4061 KB) - PDF w/links (972 KB)
Chapter 11. Bubble/Drop Transport in MicrochannelsHsueh-Chia ChangAbstract - Hi-Res PDF (402 KB) - PDF w/links (259 KB)
Chapter 12. Fundamentals of Control TheoryBill GoodwineAbstract - Hi-Res PDF (3309 KB) - PDF w/links (1098 KB)
Chapter 13. Model-Based Flow Control for Distributed ArchitecturesThomas R. BewleyAbstract - Hi-Res PDF (2150 KB) - PDF w/links (884 KB)
Chapter 14. Soft Computing in ControlMihir Sen, Bill GoodwineAbstract - Hi-Res PDF (887 KB) - PDF w/links (601 KB)
Section II. Design and FabricationAbstract - Hi-Res PDF (639 KB) - PDF w/links (414 KB)
Chapter 15. Materials for Microelectromechanical SystemsChristian A. Zorman, Mehran MehreganyAbstract - Hi-Res PDF (639 KB) - PDF w/links (414 KB)
Chapter 16. MEMS FabricationMarc J. MadouAbstract - Hi-Res PDF (9627 KB) - PDF w/links (5631 KB)
Chapter 17. LIGA and Other Replication TechniquesMarc J. MadouAbstract - Hi-Res PDF (5629 KB) - PDF w/links (3176 KB)
Chapter 18. X-Ray-Based FabricationTodd ChristensonAbstract - Hi-Res PDF (3652 KB) - PDF w/links (1405 KB)
Chapter 19. Electrochemical Fabrication (EFABTM)Adam L. CohenAbstract - Hi-Res PDF (1543 KB) - PDF w/links (628 KB)
Chapter 20. Fabrication and Characterization of Single-Crystal Silicon Carbide MEMSRobert S. OkojieAbstract - Hi-Res PDF (903 KB) - PDF w/links (638 KB)
Chapter 21. Deep Reactive Ion Etching for Bulk Micromachining of Silicon CarbideGlenn M. BeheimAbstract - Hi-Res PDF (1995 KB) - PDF w/links (262 KB)
Chapter 22. Microfabricated Chemical Sensors for Aerospace ApplicationsGary W. Hunter, Chung-Chiun Liu, Darby B. MakelAbstract - Hi-Res PDF (1082 KB) - PDF w/links (514 KB)
Chapter 23. Packaging of Harsh-Environment MEMS DevicesLiang-Yu Chen, Jih-Fen LeiAbstract - Hi-Res PDF (562 KB) - PDF w/links (393 KB)
Chapter 24. Inertial SensorsPaul L. Bergstrom, Gary G. LiAbstract - Hi-Res PDF (1075 KB) - PDF w/links (560 KB)
Chapter 25. Micromachined Pressure SensorsJae-Sung Park, Chester Wilson, Yogesh B. GianchandaniAbstract - Hi-Res PDF (732 KB) - PDF w/links (418 KB)
Chapter 26. Sensors and Actuators for Turbulent FlowsLennart LöfdahlAbstract - Hi-Res PDF (1062 KB) - PDF w/links (1027 KB)
Chapter 27. Surface-Micromachined MechanismsAndrew D. Oliver, David W. PlummerAbstract - Hi-Res PDF (1931 KB) - PDF w/links (1236 KB)
Chapter 28. MicroroboticsThorbjörn Ebefors, Göran StemmeAbstract - Hi-Res PDF (2865 KB) - PDF w/links (1204 KB)
Chapter 29. Microscale Vacuum PumpsE. Phillip Muntz, Stephen E. VargoAbstract - Hi-Res PDF (436 KB) - PDF w/links (457 KB)
Chapter 30. Microdroplet GeneratorsFan-Gang TsengAbstract - Hi-Res PDF (1264 KB) - PDF w/links (783 KB)
Chapter 31. Micro Heat Pipes and Micro Heat SpreadersG. P. “Bud” PetersonAbstract - Hi-Res PDF (2258 KB) - PDF w/links (437 KB)
Chapter 32. Microchannel Heat SinksYitshak ZoharAbstract - Hi-Res PDF (1028 KB) - PDF w/links (583 KB)
Chapter 33. Flow ControlAbstract - Hi-Res PDF (588 KB) - PDF w/links (658 KB)
Chapter 34. Reactive Control for Skin-Friction ReductionHaecheon ChoiAbstract - Hi-Res PDF (684 KB) - PDF w/links (411 KB)
Chapter 35. Towards MEMS Autonomous Control of Free-Shear FlowsAhmed NaguibAbstract - Hi-Res PDF (2905 KB) - PDF w/links (1068 KB)
Chapter 36. Fabrication Technologies for Nanoelectromechanical SystemsGary H. Bernstein, Holly V. Goodson, Gregory L. SniderAbstract - Hi-Res PDF (370 KB) - PDF w/links (380 KB)
