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Dekker Mechanical Engineering

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Micro Electro Mechanical System Design

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Micro Electro Mechanical System Design

Citation Information

Micro Electro Mechanical System Design

James J. Allen

CRC Press 2005

Print ISBN: 978-0-8247-5824-0

eBook ISBN: 978-1-4200-2775-4

Table of Contents

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Title
Front Matter

Abstract - Hi-Res PDF (615 KB) - PDF w/links (587 KB)
Chapter 1. Introduction

Abstract - Hi-Res PDF (950 KB) - PDF w/links (640 KB)
Chapter 2. Fabrication Processes

Abstract - Hi-Res PDF (2141 KB) - PDF w/links (1814 KB)
Chapter 3. MEMS Technologies

Abstract - Hi-Res PDF (3544 KB) - PDF w/links (2439 KB)
Chapter 4. Scaling Issues for MEMS

Abstract - Hi-Res PDF (1691 KB) - PDF w/links (1617 KB)
Chapter 5. Design Realization Tools for MEMS

Abstract - Hi-Res PDF (4267 KB) - PDF w/links (2344 KB)
Chapter 6. Electromechanics

Abstract - Hi-Res PDF (2226 KB) - PDF w/links (1645 KB)
Chapter 7. Modeling and Design

Abstract - Hi-Res PDF (989 KB) - PDF w/links (923 KB)
Chapter 8. MEMS Sensors and Actuators

Abstract - Hi-Res PDF (4373 KB) - PDF w/links (2456 KB)
Chapter 9. Packaging

Abstract - Hi-Res PDF (2682 KB) - PDF w/links (1637 KB)
Chapter 10. Reliability

Abstract - Hi-Res PDF (2957 KB) - PDF w/links (1957 KB)

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