Register
Log In
Home
Browse Content
Advanced Search
About CRCnetBASE
Subject Collections
How to Subscribe
Librarian Resources
News & Events
Free Trial
About this Book
Search
Permalink
http://dx.doi.org/10.1201/9781420028393
Download to Citation Mgr
View Abstracts
Add to Bookshelf
Email
Front MatterAbstract - Hi-Res PDF (432 KB) - PDF w/links (432 KB)
Chapter 1. IntroductionAbstract - Hi-Res PDF (873 KB) - PDF w/links (876 KB)
Chapter 2. Surface propertiesAbstract - Hi-Res PDF (556 KB) - PDF w/links (544 KB)
Chapter 3. FrictionAbstract - Hi-Res PDF (378 KB) - PDF w/links (385 KB)
Chapter 4. LubricationAbstract - Hi-Res PDF (692 KB) - PDF w/links (703 KB)
Chapter 5. Wear in CMPAbstract - Hi-Res PDF (324 KB) - PDF w/links (329 KB)
Chapter 6. Force transmissionAbstract - Hi-Res PDF (935 KB) - PDF w/links (945 KB)
Chapter 7. CMP padsAbstract - Hi-Res PDF (921 KB) - PDF w/links (937 KB)
Chapter 8. Post-CMP cleaningAbstract - Hi-Res PDF (368 KB) - PDF w/links (376 KB)
