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http://dx.doi.org/10.1201/9781420028270
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Front MatterAbstract - Hi-Res PDF (420 KB) - PDF w/links (397 KB)
Chapter 1. Micro- and NanofabricationAbstract - Hi-Res PDF (6557 KB) - PDF w/links (2512 KB)
Chapter 2. Microfabrication Using X-Ray LithographyDavid W. L. TolfreeAbstract - Hi-Res PDF (3269 KB) - PDF w/links (1190 KB)
Chapter 3. Etching, Machining, and Molding High-Aspect Ratio MicrostructuresGrant M. RobinsonAbstract - Hi-Res PDF (7554 KB) - PDF w/links (1554 KB)
Chapter 4. The Size Effect in MicromachiningMilton C. ShawAbstract - Hi-Res PDF (1041 KB) - PDF w/links (802 KB)
Chapter 5. Mechanical MicromachiningSam B. McSpaddenAbstract - Hi-Res PDF (6269 KB) - PDF w/links (1641 KB)
Chapter 6. Precision Microand NanogrindingSudin Izman, Vellore C. VenkateshAbstract - Hi-Res PDF (9819 KB) - PDF w/links (2278 KB)
Chapter 7. CVD Diamond Technology for Microtools, NEMS, and MEMS ApplicationsWaqar Ahmed, Htet SeinAbstract - Hi-Res PDF (7243 KB) - PDF w/links (2223 KB)
Chapter 8. Laser-Based Microand NanofabricationGrant M. RobinsonAbstract - Hi-Res PDF (8420 KB) - PDF w/links (1498 KB)
Chapter 9. Pulsed Water Drop MicromachiningLuke J. HydeAbstract - Hi-Res PDF (2142 KB) - PDF w/links (911 KB)
Chapter 10. Diamond NanogrindingGrant M. Robinson, Luke J. HydeAbstract - Hi-Res PDF (5185 KB) - PDF w/links (1631 KB)
Chapter 11. Nanometric MachiningKai Cheng, Xun LuoAbstract - Hi-Res PDF (2883 KB) - PDF w/links (1217 KB)
Chapter 12. Nanocrystalline DiamondJuan Gracio, Waqar Ahmed, Nasar AliAbstract - Hi-Res PDF (954 KB) - PDF w/links (893 KB)
Chapter 13. Commercialization Issues of Micro-Nano TechnologyDavid W. L. TolfreeAbstract - Hi-Res PDF (280 KB) - PDF w/links (281 KB)
Chapter 14. The Future of Micro- and NanomanufacturingAbstract - Hi-Res PDF (3761 KB) - PDF w/links (1541 KB)
