ABSTRACT

The term diamond-like carbon (DLC) describes hydrogen-free hard carbon solids that possess a cross-linked, non-crystalline network of sp2-and sp3 -hybridized carbon atoms [1]. Films of DLC are found to have outstanding hardness, in the range of 15 GPa. Friction and wear coefficients of DLC are lower than those of diamond, and are among the lowest recorded to date (static coefficient of friction = 0.006). DLC also offers transparency to light ranging from deep ultraviolet to far infrared. In addition, DLC films are amorphous, atomically smooth and do not contain open corrosion paths to the underlying substrate. The transparency, hardness, Young's modulus, adhesion and residual compressive stress in diamond-like carbon thin films can be tailored by controlling the sp3/sp2 ratio.