ABSTRACT
As the size of systems decreases, surface e ects become increasingly important. Capillary condensation, which results from the e ect of surfaces on the phase diagram of a uid, is an ubiquitous phenomenon at the nanoscale, occurring in all con ned geometries, divided media, cracks, or contacts between surfaces (Bowden and Tabor 1950). e very large capillary forces induced by highly curved menisci have strong e ect on the mechanical properties of contacts. e impact of capillary forces in micro/ nano electromechanical systems (MEMS & NEMS) is huge and o en prevents the function of small-scale active systems under ambient condition or causes damage during the fabrication process.
